Optical system for measuring the relative position of two planes

被引:0
|
作者
Boronakhin, A. M. [1 ]
Gorelaya, A. V. [1 ]
Venediktov, V. Yu [1 ,2 ]
机构
[1] VI Ulyanov Lenin St Petersburg State Elect Engn U, St Petersburg, Russia
[2] St Petersburg State Univ, St Petersburg 199034, Russia
关键词
D O I
10.1364/JOT.81.000676
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper discusses versions of the creation of an optical noncontact sensor for measuring the relative position of planes. By computing the center of gravity of a light spot from a reference source, the displacement of the planes relative to each other is calculated. (C) 2015 Optical Society of America.
引用
收藏
页码:676 / 680
页数:5
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