Interaction Between β-Sn Grain Orientation and Electromigration Behavior in Flip-Chip Lead-Free Solder Bumps

被引:0
|
作者
Huang Mingliang [1 ]
Sun Hongyu [1 ]
机构
[1] Dalian Univ Technol, Sch Mat Sci & Engn, Key Lab Liaoning Adv Welding & Joining Technol, Dalian 116024, Peoples R China
基金
中国国家自然科学基金;
关键词
electromigration; beta-Sn; anisotropy; cathode dissolution; IMC precipitation; grain rotation; LIQUID-SOLID ELECTROMIGRATION; INDUCED INTERFACIAL REACTIONS; SINGLE-CRYSTAL TIN; IN-SITU; INTERCONNECT; DIFFUSION; GOLD; ROTATION; JOINTS; COPPER;
D O I
10.11900/0412.1961.2017.00426
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
With the increasing demands for miniaturization, the electromigration (EM)- induced failure by diffusion anisotropy in beta-Sn is expected to be more serious than that induced by local current crowding effect, especially with the downsizing of solder bumps. In this work, the effects of Sn grain orientation on intermetallic compound (IMC) precipitation, dissolution of Ni under bump metallurgy (UBM) at the cathode, EM failure mechanism as well as the EM-induced beta-Sn grain rotation in Ni/Sn-3.0Ag-0.5Cu/Ni-P flip-chip interconnects undergoing solid-solid EM under a current density of 1.0x10(4) A/cm(2) at 150 degrees C were in situ studied. (Ni, Cu)(3)Sn-4-etype IMCs precipitated in these beta-Sn grains with a small angle theta (between the c-axis of Sn grain and electron flow direction), i.e., along the o-axis of beta-Sn grains. Stress relaxation, squeezing beta-Sn whiskers near the anode, was also observed during EM. A mathematical model on the relationship between the dissolution of Ni UBM and beta-Sn grain orientation was proposed: when the c-axis of beta-Sn grain is parallel to the electron flow direction, excessive dissolution of the cathode Ni UBM occurred due to the large diffusivity of Ni along the c-axis; when the c-axis of beta-Sn grain is perpendicular to the electron flow direction, no evident dissolution of cathode Ni UBM occurred. The proposed model agreed well with the experimental results. EM-induced beta-Sn grain rotation was attributed to the different vacancy fluxes caused by EM between adjacent grains of various grain orientation, when vacancies reached supersaturation and undersaturation at the interfaces of the anode and the cathode, respectively. Vacancy fluxes went through free surface along the interface, resulting in a normal vacancy concentration gradient. Accordingly, stress gradient produces a torque to rotate the beta-Sn grain.
引用
收藏
页码:1077 / 1086
页数:10
相关论文
共 25 条
  • [1] Electromigration and Thermomigration in Pb-Free Flip-Chip Solder Joints
    Chen, Chih
    Tong, H. M.
    Tu, K. N.
    [J]. ANNUAL REVIEW OF MATERIALS RESEARCH, VOL 40, 2010, 40 : 531 - 555
  • [2] Effect of electromigration on intermetallic compound formation in line-type Cu/Sn/Cu interconnect
    Chen, L. D.
    Huang, M. L.
    Zhou, S. M.
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 504 (02) : 535 - 541
  • [3] INTERSTITIAL DIFFUSION OF COPPER IN TIN
    DYSON, BF
    ANTHONY, TR
    TURNBULL, D
    [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (08) : 3408 - &
  • [4] Grain rotation in thin films of gold
    Harris, KE
    Singh, VV
    King, AH
    [J]. ACTA MATERIALIA, 1998, 46 (08) : 2623 - 2633
  • [5] DIFFUSION OF SB124, CD109, SN113, AND ZN65 IN TIN
    HUANG, FH
    HUNTINGT.HB
    [J]. PHYSICAL REVIEW B, 1974, 9 (04): : 1479 - 1488
  • [6] Dominant effect of high anisotropy in β-Sn grain on electromigration-induced failure mechanism in Sn-3.0Ag-0.5Cu interconnect
    Huang, M. L.
    Zhao, J. F.
    Zhang, Z. J.
    Zhao, N.
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 678 : 370 - 374
  • [7] In situ study on reverse polarity effect in Cu/Sn-9Zn/Ni interconnect undergoing liquid-solid electromigration
    Huang, M. L.
    Zhang, Z. J.
    Zhao, N.
    Yang, F.
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 619 : 667 - 675
  • [8] A synchrotron radiation real-time in situ imaging study on the reverse polarity effect in Cu/Sn-9Zn/Cu interconnect during liquid solid electromigration
    Huang, M. L.
    Zhang, Z. J.
    Zhao, N.
    Zhou, Q.
    [J]. SCRIPTA MATERIALIA, 2013, 68 (11) : 853 - 856
  • [9] Electromigration-Induced Interfacial Reactions in Cu/Sn/Electroless Ni-P Solder Interconnects
    Huang, M. L.
    Zhou, S. M.
    Chen, L. D.
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2012, 41 (04) : 730 - 740
  • [10] Current-induced interfacial reactions in Ni/Sn-3Ag-0.5Cu/Au/Pd(P)/Ni-P flip chip interconnect
    Huang, M. L.
    Ye, S.
    Zhao, N.
    [J]. JOURNAL OF MATERIALS RESEARCH, 2011, 26 (24) : 3009 - 3019