MEMS-based Ultrasonic Flow Measurement

被引：0
|
作者：
Zhang Jin [1 ]
Wang Boxiong [1 ]
Luo Xiuzhi [1 ]
Fan Shangchun
Zhang Lixin
机构：
[1] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments & Mechanol, Beijing 100084, Peoples R China
来源：
ISTM/2009: 8TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6 | 2009年
关键词：
Ultrasonic Flow Metering; Ultrasonic MEMS transducers; MEMS-based USFM; Current Limitations; Potential Applications;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Over the past 10 years, Ultrasonic Flow Metering(USFM) has evolved from niche flow measurement solution to the mainstream. Despite this growth and development, this paper analyzes the technical limitations, such as: impedance mismatching, timing accuracy, flow profile correction, signal strength, accuracy etc. Microelectromechanical systems(MEMS) have been considered as a technical field that has a huge growth in research and capability in recent years. Consequently there are many researches on MEMS for USFM. The paper presents a summary of ultrasonic MEMS transducers suitable for USFM and the potential applications for MEMS based USFM1
引用
收藏
页码：1227 / 1232
页数：6
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