A novel adaptive laser processing system for flying optics

被引:0
|
作者
Zhao, QZ [1 ]
Cheng, ZG [1 ]
Gao, HJ [1 ]
Huang, HJ [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
关键词
flying optics; adaptive control; focusing characteristics; laser processing;
D O I
10.1117/12.497930
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
The focusing characteristics of higher-order mode Gaussian beams in flying optics were investigated in detail. On the basis, a novel adaptive laser processing system for flying optics was developed. In the system, a lens with long focal length and two adaptive deformable mirrors controlled by hydraulic were employed. The lens was near the laser source for some distance and the two adaptive mirrors were integrated together with parabolic focusing mirror. The system has the advantages of compact structure and easy control. The system can keep the focus position and the focus radius constant for long distance laser processing.
引用
收藏
页码:139 / 141
页数:3
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