Filamentary, patterned, and diffuse barrier discharges

被引:621
|
作者
Kogelschatz, U [1 ]
机构
[1] ABB Corp Res Ltd, Baden, Switzerland
关键词
atmospheric-pressure plasmas; barrier discharges; diffuse discharges; microdischarges; nonequilibrium plasmas; pattern formation; silent discharges;
D O I
10.1109/TPS.2002.804201
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Barrier discharges, also known as dielectric-barrier discharges or silent discharges, provide a simple technology to establish nonequilibrium plasma conditions in atmospheric-pressure gases. This property has led to a number of industrial applications, including ozone generation, surface modification, pollution control, CO2 lasers, excimer lamps, and flat plasma-display panels. Depending on a variety of gas properties, operating parameters, and boundary conditions, the discharge can exhibit pronounced filamentary character, self-organized regular-discharge patterns, or completely diffuse appearance. The literature on these different types of barrier discharges is reviewed, and the underlying physical phenomena are discussed. Relative recent investigations on low-current density diffuse barrier discharges suggest novel applications of fairly "mild" plasmas for sterilization and disinfection purposes and utilizing their selective influence on biological cells.
引用
收藏
页码:1400 / 1408
页数:9
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