Reducing the optical loss of polysilicon waveguide in bulk CMOS by waveguide geometry engineering

被引：0

作者：

Song, Zhan-Wen ^{[1
]}

Tang, Cheng-Tse ^{[1
]}

Lee, San-Liang ^{[2
]}

Hung, Yung-, Jr. ^{[1
]}

机构：

[1] Natl Sun Yat Sen Univ, Dept Photon, Kaohsiung 80424, Taiwan

[2] Natl Taiwan Univ Sci & Technol, Taipei 104, Taiwan

来源：

2020 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC 2020) | 2020年

关键词：

polysilicon; bulk CMOS; subwavelength grating waveguide;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Based on the zero-process-change methodology, we successfully reduce the propagation loss of polysilicon waveguide from 112 dB/cm to only 38 dB/cm by applying subwavelength grating waveguide (SWG) design. Low propagation loss in SWG waveguide is attributed to a significantly reduced optical overlap factor of 0.09 to bulk polysilicon. This achievement can not be made by solely shrinking the waveguide dimension, thus validates a promising design path towards practical photonic-electronic applications in bulk CMOS.

引用

页数：3

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