Flexible piezoresistive pressure sensor based on wrinkled layers with fast response for wearable applications

被引:28
|
作者
Du, Dawei [1 ]
Ma, Xinyue [1 ]
An, Wenxing [1 ]
Yu, Shihui [2 ]
机构
[1] Tianjin Univ, Sch Microelect, Tianjin Key Lab Imaging & Sensing Microelect Techn, Tianjin 300072, Peoples R China
[2] Luoyang Inst Sci & Technol, Dept Elect Engn & Automation, Luoyang 471023, Henan, Peoples R China
基金
中国国家自然科学基金;
关键词
Flexible pressure sensor; Wrinkled morphology; Piezoresistive sensor; Silver nanowire; Human motion monitoring; Micro-structure; SILVER NANOWIRES; SPRAY DEPOSITION; HIGH-PERFORMANCE; ELECTRONIC SKIN; STRAIN SENSORS; TRANSPARENT; POLYDIMETHYLSILOXANE; PDMS;
D O I
10.1016/j.measurement.2022.111645
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Flexible piezoresistive sensors are promising candidates for vital components of prospective wearable sensing systems in human-centered intelligent applications. Herein, we present a novel flexible piezoresistive pressure sensor based on the structure of silver nanowires (AgNWs) on polydimethylsiloxane (PDMS) with a wrinkled surface. Modifying the PDMS microstructure enables the sensor to obtain different sensitivities and pressure ranges. At the optimal conditions, our sensor exhibits a high sensitivity of 2.588 kPa(-1) and a large pressure range with a very low detectable pressure limit (<1 Pa), which can measure a seed weight of sesame (similar to 2 mg). Furthermore, The elastic microstructure-based piezoresistive sensor also possesses a very fast response time (10 ms), rapid recovery (20 ms), and excellent cycling stability. The real-time pressure detection ability is demonstrated by the touching behavior, the muscle and joint movement and the vocalization recognition, presenting great application potential in human-machine interaction, human motion monitoring and intelligent robotic systems.
引用
收藏
页数:8
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