Optical coupling of cylindrical micro mirrors in micro-optical benches

被引：0
|
作者：
Sabry, Yasser M. [1 ]
Bourouina, Tarik [2 ,3 ]
Khalil, Diaa [1 ,2 ]
机构：
[1] Ain Shams Univ, Fac Engn, Cairo, Egypt
[2] Si Ware Syst, MEMS Div, Cairo, Egypt
[3] Univ Paris Est, ESIEE Paris, Noisy Le Grand, France
来源：
2015 32ND NATIONAL RADIO SCIENCE CONFERENCE (NRSC) | 2015年
关键词：
Coupling efficiency; curved mirror; DRIE; Gaussian beam; micro-optics; silicon photonics; MICROSTRUCTURES;
D O I：
暂无
中图分类号：
TN [电子技术、通信技术];
学科分类号：
0809 ;
摘要：
Free-space optical coupling is a critical performance feature in micro-optical benches, where coupling elements are designed to mitigate optical beam divergence phenomena associated with Gaussian beam propagation and to achieve phase/mode matching. In this paper, the free-space coupling of Gaussian beams using cylindrical micromirrors is analyzed. The treatment accounts for the non-idealities including limited mirror aperture and radius of curvature, surface roughness and misalignment between the mirror axis and the optical beam axis. The coupling efficiency is calculated based on the overlap integral and the ABCD transfer matrix. The analysis can treat astigmatic as well as simple stigmatic Gaussian beams. Throughout the whole of our analysis, parameter normalization is used such that our findings are independent of the specific values of the operating wavelength and the Gaussian beam parameters. The analysis is verified with optical measurements on micromachined cylindrical mirrors with radii of curvature of 50 mu m and 300 mu m.
引用
收藏
页码：340 / 346
页数：7
相关论文
共 50 条
  • [1] Modular integration of microactuators and micro-optical benches
    Schuele, S.
    Hollenbach, U.
    Mohr, J.
    Li, J.
    Vorreau, P.
    Efremov, A.
    Leuthold, J.
    Schonhardt, S.
    [J]. MICRO-OPTICS 2008, 2008, 6992
  • [2] Mobile flat mirrors for micro-optical scanners
    Molar-Velazquez, G.
    Renero-Carrillo, F. J.
    Calleja-Arriaga, W.
    [J]. MOEMS AND MINIATURIZED SYSTEMS VII, 2008, 6887
  • [3] Positioning accuracy characterization of assembled microscale components for micro-optical benches
    Clevy, Cedric
    Lungu, Ion
    Rabenorosoa, Kanty
    Lutz, Philippe
    [J]. ASSEMBLY AUTOMATION, 2014, 34 (01) : 69 - 77
  • [4] Assembly of a micro-optical resonator based on silicon micro mirrors for use in gyroscopes
    Leber, I.
    Niesel, T.
    Werner, C.
    Yu, L.
    Flugge, J.
    Dietzel, A.
    [J]. CURRENT DEVELOPMENTS IN LENS DESIGN AND OPTICAL ENGINEERING XVIII, 2017, 10375
  • [5] Metallic optical benches with stamped micro-mirrors for photonic assemblies and optical interconnects
    Chen, Yang
    Hii, King-Fu
    Vallance, R. Ryan
    [J]. OPTICAL INTERCONNECTS XX, 2020, 11286
  • [6] Micro-optical bench for alignment-free optical coupling
    Aoki, Y
    Kato, T
    Mizuno, RJ
    Iga, K
    [J]. APPLIED OPTICS, 1999, 38 (06) : 963 - 965
  • [7] MICRO-OPTICAL SWELLING
    DAVISON, S
    [J]. RUBBER AGE, 1968, 100 (11): : 76 - &
  • [8] Polymer-based membrane mirrors for micro-optical sensors
    Friese, C
    Wissmann, M
    Zappe, H
    [J]. PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, : 667 - 672
  • [9] Fabrication of a micro-optical coupling structure by laser ablation
    Kim, JT
    Kim, BC
    Jeong, MY
    Lee, MS
    [J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2004, 146 (02) : 163 - 166
  • [10] MODULAR AND RECONFIGURABLE 3D MICRO-OPTICAL BENCHES : CONCEPT, VALIDATION, AND CHARACTERIZATION
    Rabenorosoa, K.
    Bargiel, C. Clevy S.
    Mascaro, J. P.
    Lutz, P.
    Gorecki, C.
    [J]. PROCEEDINGS OF THE ASME INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE 2011, VOL 2, 2011, : 479 - 485
12345