Hydrogenated amorphous carbon deposition by saddle-field glow discharge

被引：0
|
作者：
Zukotynski, S [1 ]
Gaspari, F [1 ]
Manage, D [1 ]
Pletnev, V [1 ]
Sagnes, E [1 ]
机构：
[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON, Canada
来源：
AMORPHOUS AND NANOSTRUCTURED CARBON | 2000年 / 593卷
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The saddle-field grow discharge is modeled and electron multiplication and energy spectra are presented. The roles of the ion substrate current and ion energy at the substrate on the growth rate, hydrogen content, sp(2) content and energy gap are discussed and the effects of atmospheric aging and high temperature annealing are described.
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页码：239 / 248
页数：10
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