Design and Development of Software for the SILAR Control Process Using a Low-Cost Embedded System

被引：5

作者：

Calixto-Rodriguez, M. ^{[1
]}

Valdez Martinez, Jorge S. ^{[1
]}

Meneses-Arcos, M. A. ^{[2
]}

Ortega-Cruz, Jose ^{[3
]}

Sarmiento-Bustos, E. ^{[1
]}

Reyes-Mayer, Adriana ^{[1
]}

Gonzalez-Castaneda, Michelle ^{[1
]}

Dominguez Garcia, Rodolfo Omar ^{[4
]}

机构：

[1] Technol Univ Emiliano Zapata State Morelos, Acad Div Ind Mech, Av Univ Tecnol 1, Emiliano Zapata 62760, Morelos, Mexico

[2] Natl Technol Mexico Natl Ctr Technol Res & Dev CE, Dept Elect Engn, Interior Internado Palmira S-N, Cuernavaca 62490, Morelos, Mexico

[3] Univ Nacl Autonoma Mexico, Inst Renewable Energies, Privada Xochicalco S-N, Temixco 62580, Morelos, Mexico

[4] Univ Guadalajara, Los Valles Univ Ctr, Dept Computat Sci & Engn, Guadalajara Ameca Highway Km 45-5, Ameca 46600, Jalisco, Mexico

来源：

PROCESSES | 2021年 / 9卷 / 06期

关键词：

SILAR; semiconductor thin films; copper oxide (CuO); automation; HMI; embedded systems; IONIC LAYER ADSORPTION; ZNO THIN-FILMS; OXIDE; ELECTRODEPOSITION; FABRICATION;

D O I：

10.3390/pr9060967

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Inexpensive equipment for the deposition of semiconductor thin films by SILAR was designed. Using a low-cost embedded system, a prototype controlled through a human-machine interface (HMI) was constructed. Simple, open-source software was used. The use of an HMI and programming based on state machines showed an improvement in the system control, program flow, and efficiency. The system development consists of three stages: structural design, electronics, and programming of the control and HMI. This system controls the variables of the SILAR process, such as immersion time in chemical solutions, sequence of substrates, and the number of cycles. In order to test the automated SILAR prototype, copper oxide thin films on glass substrates were processed. The copper oxide thin films have been characterized by X-ray diffraction (XRD), UV-VIS, and SEM to investigate the structural, optical, and morphological properties, respectively.

引用

页数：19

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