Feedback Controller Design with Adaptive Hysteresis Modeling in Piezo-Driven Stage Systems

This paper presents an adaptive hysteresis compensation approach to improve the positioning performance in piezo-driven stage systems. In the high-precision positioning system using piezoelectric actuator, hysteresis property should be adequately compensated to achieve desired settling performance in positioning. A feedback compensation including the inverse model of hysteresis is one of potent control approaches for improving the positioning performance deteriorated by the hysteresis. However, the compensation performance using inverse model depends on the model accuracy. In this paper, the model parameter of hysteresis is updated using normalized least mean square (NLMS) algorithm during positioning. Based on the adaptive hysteresis model, an inverse model-based compensator combined with linear feedback compensator is designed as the feedback control system. The proposed approach has been evaluated by conducting experiments using a commercial piezo-driven stage system.