Matrixes of unconventional micro-optical components molded with etched silicon

This paper reports on a process to create microlenses characterized by unconventional footprints, spherical profiles and a wide range of sizes. Fabricated shapes such as squares, rectangles, ellipses, triangles and hexagons are tested alone as well as in matrix with high fulfill factors. The technique is based on molds from which microlenses are fabricated by UV-molding replication. The molds are produced by silicon wet isotropic etching in an acid solution. The process is mainly steered by temperature and etching concentration. The use of the proposed technology opens a wide range of geometries allowing the fabrication of microlenses matrices with high fulfill factors as well as microlenses for beam-shaping. [DOI: 10.2971/jeos.2010.10001]