Application of immersion method for measuring freeform surfaces

被引：0
|
作者：
Lvova, Kseniia [1 ,2 ]
Kaidarakova, Victoria [1 ]
Perevoznikova, Anastasia [1 ,2 ]
Druzhin, Vladislav [1 ]
机构：
[1] Bauman Moscow State Tech Univ, Moscow, Russia
[2] Russian Acad Sci, Lebedev Phys Inst, Moscow, Russia
来源：
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XI | 2019年 / 11056卷
关键词：
freeform optics; freeform surface; profile measurement; immersion method; immersion liquid;
D O I：
10.1117/12.2530566
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Simple and cost-effective immersion method for freeform optical surface (FFS) measurements is proposed. Method is based on the determination of the borderline curve formed between the contacted immersion liquid and the controlled surface. Proposed method is suitable for measuring polished and rough surfaces, convex and concave freeform, aspheric, spherical surfaces, prisms and another optical and non-optical 3D objects having freeform surface.
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页数：7
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