Ion implantation effects of microcrystalline and nanocrystalline diamond thin films

被引：0
|
作者：
Narayanan, KL
Soga, T
Tokunaga, T
Yamaguchi, M
机构：
[1] Tokyo Inst Technol, Dept Phys Electron, Meguro Ku, Tokyo 1528552, Japan
[2] Nagoya Inst Technol, Dept Environm Technol & Urban Planning, Showa Ku, Nagoya, Aichi 4668555, Japan
[3] Toyota Technol Inst, Semicond Res Ctr, Tempa Ku, Nagoya, Aichi 4688511, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 12期
关键词：
diamond; nanocrystalline; microcrystal line; a-carbon; implantation; structure;
D O I：
10.1143/JJAP.43.7971
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Microcrystalline and nanocrystalline diamond thin films deposited on Si substrates by microwave plasma chemical vapor deposition are bombarded by 40keV B+ ions. Raman scattering studies of the ion implanted diamond films reveal the structural modification irrespective of the nature of the crystalline quality. X-ray diffraction results indicate the possibility of formation of borocarbide phase on ion irradiation. Ion beam current dependence and post ion implantation annealing studies on the micro and nano-crystal line thin films are also presented.
引用
收藏
页码：7971 / 7975
页数：5
相关论文
共 50 条
  • [1] Ion implantation effects of microcrystalline and nanocrystalline diamond thin films
    [J]. Narayanan, K.L. (klnbabu@solid.titech.ac.jp), 1600, Japan Society of Applied Physics (43):
  • [2] Ion-implantation of erbium to the nanocrystalline diamond thin films
    Nekvindova, P.
    Babchenko, O.
    Cajzl, J.
    Kromka, A.
    Mackova, A.
    Malinsky, P.
    Oswald, J.
    Prajzler, V.
    Remes, Z.
    Varga, M.
    [J]. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2016, 18 (7-8): : 679 - 684
  • [3] High-temperature Dielectric Behavior of Nanocrystalline and Microcrystalline Diamond Thin Films
    Govindaraju, N.
    Das, D.
    Kosel, P. B.
    Singh, R. N.
    [J]. STATE-OF-THE-ART PROGRAM ON COMPOUND SEMICONDUCTORS 52 (SOTAPOCS 52), 2010, 33 (13): : 155 - 168
  • [4] Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing
    Dai, Dan
    Wang, Jiale
    Chen, Chengke
    Ye, Haitao
    Peng, Nianhua
    Pan, Jinping
    Hu, Xiaojun
    [J]. FUNCTIONAL DIAMOND, 2024, 4 (01):
  • [5] Influence of nitrogen ion implantation on tribological properties of nanocrystalline diamond films
    Xu, T
    Yang, SR
    Chen, M
    Tian, J
    Xue, QJ
    Li, JQ
    Guo, WT
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 35 (08) : 788 - 793
  • [6] EFFECTS OF ION-IMPLANTATION ON POLYCRYSTALLINE DIAMOND FILMS
    ZHANG, XK
    GUO, JG
    YAO, YF
    FANG, F
    [J]. VACUUM, 1992, 43 (11) : 1047 - 1049
  • [7] Electron field emission properties of gamma irradiated microcrystalline diamond and nanocrystalline carbon thin films
    Gupta, S
    Weiss, BL
    Weiner, BR
    Pilione, L
    Badzian, A
    Morell, G
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 92 (06) : 3311 - 3317
  • [8] Growth and optical properties of nanocrystalline/microcrystalline diamond multilayer films
    Luo, JL
    Ying, XT
    Wang, PN
    Chen, LY
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005, 46 : S224 - S228
  • [9] ION-IMPLANTATION OF DIAMOND AND DIAMOND FILMS
    PRAWER, S
    [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) : 862 - 872
  • [10] Processing of multilayer microcrystalline and nanocrystalline diamond thin films using Ar-rich microwave plasmas
    Nirmal Govindaraju
    Chaitanya Kane
    Raj N. Singh
    [J]. Journal of Materials Research, 2011, 26 : 3072 - 3082
12345