Flexible thin-film transistors application of amorphous tin oxide-based semiconductors

被引:5
|
作者
Liu, Xianzhe [1 ]
Ning, Honglong [1 ]
Zhang, Xu [1 ]
Deng, Yuxi [1 ]
Guo, Dong [2 ]
Wang, Yiping [3 ]
Wang, Xiaofeng [4 ]
Yuan, Weijian [1 ]
Yao, Rihui [1 ]
Peng, Junbiao [1 ]
机构
[1] South China Univ Technol, State Key Lab Luminescent Mat & Devices, Inst Polymer Optoelect Mat & Devices, Guangzhou, Guangdong, Peoples R China
[2] Beihang Univ, Sch Mat Sci & Engn, Beijing, Peoples R China
[3] Nanjing Univ Aeronaut & Astronaut, State Key Lab Mech & Control Mech Struct, Nanjing, Jiangsu, Peoples R China
[4] Chinese Acad Sci, Inst Semicond, Beijing, Peoples R China
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
amorphous Si-doped SnO2; flexible thin-film transistor; metal-oxide semiconductor; OPTICAL-PROPERTIES;
D O I
10.1002/jsid.849
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The structural, optical, and electrical properties of Si-doped SnO2 (STO) films were investigated in terms of their potential applications for flexible electronic devices. All STO films were amorphous with an optical transmittance of similar to 90%. The optical band gap was widened as the Si content increased. The Hall mobility and carrier density were improved in the SnO2 with 1 wt% Si film, which was attributed to the formation of donor states. Si (1 wt%) doped SnO2 thin-film transistor exhibited a good device performance and good stability with a saturation mobility of 6.38 cm(2)/Vs, a large I-on/I-off of 1.44 x 10(7), and a SS value of 0.77 V/decade. The device mobility of a-STO TFTs at different bending radius maintained still at a high level. These results suggest that a-STO thin films are promising for fabricating flexible TFTs.
引用
收藏
页码:769 / 775
页数:7
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