Stiction problem of annular-shaped laser textured bump on a hard disk

被引:3
|
作者
Oka, M [1 ]
机构
[1] Fuji Elect Corp Res & Dev Ltd, Nagano 3900821, Japan
关键词
stiction; annular-shaped laser; laser textured bumps;
D O I
10.1016/S0301-679X(00)00052-9
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
The stiction force strongly depends on the bump parameters. Numerical simulation has been used to estimate the stiction force. Several schemes have been proposed. In these schemes, the relation between the elastic deformation of bumps and the load plays a very important part. To estimate the stiction force of annular shaped bumps, the solution of the cylindrical contact problem of Hertz theory is used. But this solution doesn't converge so that it may not give the correct solution for the annular contact problem. This paper presents an exact solution of elastic deformation of laser textured bumps for the annular type. The exact and precise solution is obtained numerically and analytically. The contact problem is reduced to a pair of integral equations of the Fredholm type. It can be solved by a simple numerical method. The solution can be used for the numerical estimation of the bump deformation during the CSS process. The results are compared with former researches. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:353 / 356
页数:4
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