Multi-Frequency Band Pyroelectric Sensors

A methodology is proposed for designing a multi-frequency band pyroelectric sensor which can detect subjects with various frequencies or velocities. A structure with dual pyroelectric layers, consisting of a thinner sputtered ZnO layer and a thicker aerosol ZnO layer, proved helpful in the development of the proposed sensor. The thinner sputtered ZnO layer with a small thermal capacity and a rapid response accomplishes a high-frequency sensing task, while the thicker aerosol ZnO layer with a large thermal capacity and a tardy response is responsible for low-frequency sensing tasks. A multi-frequency band pyroelectric sensor is successfully designed, analyzed and fabricated in the present study. The range of the multi-frequency sensing can be estimated by means of the proposed design and analysis to match the thicknesses of the sputtered and the aerosol ZnO layers. The fabricated multi-frequency band pyroelectric sensor with a 1 mu m thick sputtered ZnO layer and a 20 mu m thick aerosol ZnO layer can sense a frequency band from 4000 to 40,000 Hz without tardy response and low voltage responsivity.