ELECTRON OPTICAL PROPERTIES OF A NEW LOW-ENERGY SCANNING ELECTRON MICROSCOPE WITH A BEAM SEPARATOR

被引：0
|
作者：
Radlicka, T. [1 ]
Kolarik, V. [2 ]
Oral, M. [1 ]
机构：
[1] CAS, Inst Sci Instruments, Vvi, Kralovopolska 147, Brno 61664, Czech Republic
[2] Delong Instruments As, Palackeho Trida 3019-153b, Brno 61200, Czech Republic
来源：
RECENT TRENDS IN CHARGED PARTICLE OPTICS AND SURFACE PHYSICS INSTRUMENTATION | 2018年
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
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页码：64 / 64
页数：1
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