REFLECTION OF keV LIGHT IONS FROM SOLIDS AT OBLIQUE AND GRAZING INCIDENCE

The particle reflection coefficient of fight keV ions backscattered from heavy targets has been determined by two different analytical approaches: by the single collision model in the case of nearly perpendicular incidence and by the small-angle multiple scattering theory in the case of glancing angles of incidence. The obtained analytical formulae are approximately universal functions of the scaled transport cross-section describing the reflection of all light ions from heavy targets. Going from perpendicular to grazing incidence, the transition from pure single to pure multiple scattering type of reflection is observed. For larger values of the scaling parameter the results of these theories cover the whole region of ion incident angles and the present estimates of the particle reflection coefficient are in good agreement with the results obtained from the empirical formula of Tabata et al.