Microelectromechanical Phase Detectors for Phase-Locked Loop Applications

This paper demonstrates for the first time an architecture for realising a phase-locked loop (PLL) utilising coupled electrostatic MEMS comb resonators as a key building block. A tunable electrically-coupled device operating at 310 KHz is presented with applications as a phase and frequency reference for PLLs. A mechanically-coupled 310 KHz resonator that exploits Huygens Synchronization with applications as a phase and frequency reference for PLLs is also presented. Both are produced using the ubiquitous PolyMUMPS process. The designs are supported by mathematical and simulation results. Avenues for integrating each element into a monolithic device achieving PLL functionality are proposed.