Design, implementation, and verification of a CMOS-Integrated chemical sensor system

Single-chip chemical micro instruments offer many benefits over bench-top laboratory equipment. This work presents the design, implementation, and verification of a CMOS-integrated micro instrument including voltammetric sensors and electronic interface on a single silicon substrate. Both component and system design parameters are detailed. Mixed-domain models of the system which can be simulated in a standard CAD environment are generated and used for system optimization. The integrated device was implemented by post-processing sensor structures on top Of AMIS-fabricated, 0.5 mum CMOS electronics. Fabrication details are discussed and experimental device characteristics including functionality and lifetime testing are presented The completed device has an active area of 0.6mm(2) with sensors sites measuring 64mum(2). It operates from a 3V supply and consumes 1.6mW.