Vapor-liquid-solid growth of silicon nanowires using organosilane as precursor

被引：16
|
作者：
Yang, Hong-Jie [1 ]
Yuan, Fang-Wei [1 ]
Tuan, Hsing-Yu [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Chem Engn, Hsinchu 30013, Taiwan
来源：
CHEMICAL COMMUNICATIONS | 2010年 / 46卷 / 33期
关键词：
ELECTRONIC DEVICES; SURFACE MIGRATION; NANOPARTICLES; DECOMPOSITION; KINETICS; WIRES;
D O I：
10.1039/c0cc01454k
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Utilizing monophenylsilane as the precursor and liquid injection chemical vapor deposition (LICVD) as the fabrication method offers a novel synthetic approach for the facile, ambient pressure, and continuous vapor-liquid-solid (VLS) synthesis of high quality Si nanowires.
引用
收藏
页码：6105 / 6107
页数：3
相关论文
共 50 条
  • [1] Extended Vapor-Liquid-Solid Growth of Silicon Carbide Nanowires
    Rajesh, John Anthuvan
    Pandurangan, Arumugam
    [J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2014, 14 (04) : 2741 - 2751
  • [2] Vapor-liquid-solid growth of silicon-germanium nanowires
    Lew, KK
    Pan, L
    Dickey, EC
    Redwing, JM
    [J]. ADVANCED MATERIALS, 2003, 15 (24) : 2073 - +
  • [3] Microspheres for the Growth of Silicon Nanowires via Vapor-Liquid-Solid Mechanism
    Gomez-Martinez, Arancha
    Marquez, Francisco
    Elizalde, Eduardo
    Morant, Carmen
    [J]. JOURNAL OF NANOMATERIALS, 2014, 2014
  • [4] Template-directed vapor-liquid-solid growth of silicon nanowires
    Lew, KK
    Reuther, C
    Carim, AH
    Redwing, JM
    Martin, BR
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (01): : 389 - 392
  • [5] Suppression of the vapor-liquid-solid growth of silicon nanowires by antimony addition
    Nimmatoori, Pramod
    Zhang, Qi
    Dickey, Elizabeth C.
    Redwing, Joan M.
    [J]. NANOTECHNOLOGY, 2009, 20 (02)
  • [6] Vapor-liquid-solid growth of silicon nanowires by chemical vapor deposition on implanted templates
    Christiansen, S.
    Schneider, R.
    Scholz, R.
    Goesele, U.
    Stelzner, Th.
    Andrae, G.
    Wendler, E.
    Wesch, W.
    [J]. JOURNAL OF APPLIED PHYSICS, 2006, 100 (08)
  • [7] Patterned epitaxial vapor-liquid-solid growth of silicon nanowires on Si(111) using silane
    Schmid, H.
    Bjoerk, M. T.
    Knoch, J.
    Riel, H.
    Riess, W.
    Rice, P.
    Topuria, T.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 103 (02)
  • [8] Patterned epitaxial vapor-liquid-solid growth of silicon nanowires on Si(111) using silane
    Schmid, H.
    Björk, M.T.
    Knoch, J.
    Riel, H.
    Riess, W.
    Rice, P.
    Topuria, T.
    [J]. Journal of Applied Physics, 2008, 103 (02):
  • [9] Growth of silicon nanowires via gold/silane vapor-liquid-solid reaction
    Westwater, J
    Gosain, DP
    Tomiya, S
    Usui, S
    Ruda, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (03): : 554 - 557
  • [10] Vapor-Liquid-Solid Growth of Endotaxial Semiconductor Nanowires
    Li, Shaozhou
    Huang, Xiao
    Liu, Qing
    Cao, Xiehong
    Huo, Fengwei
    Zhang, Hua
    Gan, Chee Lip
    [J]. NANO LETTERS, 2012, 12 (11) : 5565 - 5570
12345