IMEC building cleanroom

被引：0

作者：

不详

机构：

来源：

MICRO | 2003年 / 21卷 / 02期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：20 / 22

页数：3

共 50 条

[1] imec plans 450mm cleanroom with government investment
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