3D modelling for Radio-Frequency plasma devices

被引：0
|
作者：
Feliachi, M [1 ]
Louai, FZ [1 ]
Benzerga, D [1 ]
Develey, G [1 ]
机构：
[1] CRTT,LRTI,IUT GE44,F-44602 ST NAZAIRE,FRANCE
来源：
NONLINEAR ELECTROMAGNETIC SYSTEMS | 1996年 / 10卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：950 / 953
页数：4
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