Optimization of Etching Conditions for Site-Controlled Tunnel Pits with High Aspect Ratios in Al Foil

被引：19

作者：

Fukushima, Tatsuro ^{[1
]}

Nishio, Kazuyuki ^{[1
]}

Masuda, Hideki ^{[1
]}

机构：

[1] Tokyo Metropolitan Univ, Dept Appl Chem, Tokyo 1920397, Japan

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2010年 / 157卷 / 04期

关键词：

aluminium; anodes; electrochemical electrodes; electrolytes; etching; foils; SCANNING ELECTRON MICROSCOPE; MATHEMATICAL-MODEL; ETCHED ALUMINUM; KINETIC-MODEL; MASKING FILM; GROWTH; CAPACITORS; PASSIVATION; MORPHOLOGY; BEHAVIOR;

D O I：

10.1149/1.3308594

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The most appropriate conditions in the site-controlled anode etching of Al using a mask film for the formation of tunnel pits with high aspect ratios over 20 were examined. Anode etching under a reducing current density at an appropriate ratio against time (200 mA cm(-2) s(-1)) was effective for the suppression of the undesirable lateral dissolution of the Al surface. Moreover, the addition of a small amount of H(2)SO(4) to HCl electrolyte increased the depth of the obtained tunnel pits. By adopting the appropriate anode etching conditions, these improvements could generate site-controlled deep tunnel pits with depths of over 50 mu m.

引用

页码：C137 / C139

页数：3

共 4 条

[1] Fabrication of site-controlled tunnel pits with high aspect ratios by Electrochemical etching of Al using masking film
Nishio, Kazuyuki
Fukushima, Tatsuro
Takeda, Akifumi
Masuda, Hideki
[J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (10) : C60 - C62
[2] Inkjet Printing for Site-Controlled Tunnel Pitting with High Aspect Ratio in Al
Fukushima, Tatsuro
Nishio, Kazuyuki
Masuda, Hideki
[J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2010, 13 (04) : C9 - C11
[3] Surface-Enhanced Raman Scattering in Hierarchical Structures of Au Formed Using Templates by Site-Controlled Tunnel Etching of Al
Kondo, Toshiaki
Fukushima, Tatsuro
Nishio, Kazuyuki
Masuda, Hideki
[J]. APPLIED PHYSICS EXPRESS, 2009, 2 (12)
[4] Fabrication of Ordered Trench Structures with High Aspect Ratios by Anisotropic Anode Etching of Al(100)
Fukushima, Tatsuro
Takeda, Akifumi
Nishio, Kazuyuki
Masuda, Hideki
[J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2010, 13 (07) : C17 - C19

← 1 →