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Asia-Pacific: A new semiconductor market dynamic and a new need for lithography tools
被引:0
|作者:
Zafiropoulo, AW
[1
]
机构:
[1] Ultratech Stepper Inc, San Jose, CA 95134 USA
来源:
关键词:
D O I:
暂无
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The history of the semiconductor manufacturing industry in Asia provides a useful perspective for the current growth and developments there. The success of the wafer foundries has prompted the creation of a new business: wafer-bumping foundries for flip-chip products. Lithography tools have found a new role in these facilities, with the bump foundries using them for patterning bumps on wafers. The advantages of steppers for this application are discussed.
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页码:S29 / +
页数:3
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