Boron implantation doping of diamond

Spin polarized B-12 nuclei were produced in B-11(d,p)B-12 nuclear reaction and recoil implanted into a type Ib diamond sample at doses below 10(11) cm(-2). beta-radiation detected nuclear magnetic resonance spectra were measured directly after implantation at sample temperatures ranging from 300 to 800 K. The polarization asymmetry at the Larmor resonance yielded fractions of boron ions at sites of full tetrahedral symmetry of 12(1)% at 300 K, increasing to 17(2)% at 800 K. It is argued that these boron atoms are incorporated substitutionally by direct replacement collisions during the implantation process, The resonance spectra also showed additional boron at low-symmetry sites. (C) 1997 American Institute of Physics. [S0003-6951(97)01551-9].