[1] Chinese Acad Sci, Engn Res Ctr Semicond Integrated Technol, Inst Semicond, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[3] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[4] Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
[5] Univ Sci & Technol China, Dept Elect Sci & Technol, Hefei 230026, Peoples R China
[6] Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
[7] Beijing Acad Quantum Informat Sci, Beijing 100193, Peoples R China
[8] Beijing Engn Res Ctr Semicond Micronano Integrate, Beijing 100083, Peoples R China