Phase Noise Measurements of AlN Contour-Mode Resonators With Carrier Suppression Technique

被引：3

作者：

Vaillant, Etienne ^{[1
]}

Sthal, Fabrice ^{[1
]}

Imbaud, Joel ^{[1
]}

Soumann, Valerie ^{[1
]}

Abbe, Philippe ^{[1
]}

Arapan, Lilia ^{[1
]}

Esnault, Francois-Xavier ^{[2
]}

Cibiel, Gilles ^{[2
]}

Segovia-Fernandez, Jeronimo ^{[3
]}

Piazza, Gianluca ^{[3
]}

机构：

[1] Univ Bourgogne Franche Comte, Franche Comte Elect Mecan Therm & Opt Sci & Tech, Ecole Natl Super Mecan & Microtech, CNRS, F-25000 Besancon, France

[2] Ctr Natl Etud Spatiales, Dept Time & Frequency, F-31400 Toulouse, France

[3] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2018年 / 65卷 / 10期

关键词：

1/f noise; aluminum nitride (AlN ); carrier suppression technique; contour-mode resonators (CMRs); microelectromechanical systems (MEMS) resonators; phase noise; OSCILLATOR;

D O I：

10.1109/TUFFC.2018.2850223

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

In this paper, the phase noise of aluminum nitride (AlN) contour-mode resonators is investigated using a passive measurement system with carrier suppression. The purpose is to make careful measurements of the performance of AlN resonators in order to better understand and clarify previously reported frequency instability in these devices. The resonant frequencies of the resonators are around 220 MHz. The motional parameters, the thermal behavior, and the nonlinear power effect of these resonators have been evaluated. Then, the principle of the noise measurement system is reviewed, and the resonator conditioning is shown. Finally, the noise measurements of the resonators are presented and discussed.

引用

页码：1943 / 1950

页数：8

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