Negative thermal expansion in ultrathin plasma polymerized films

被引:17
|
作者
Singamaneni, Srikanth
Le Mieux, Melburne C.
Jiang, Hao
Bunning, Timothy J. [1 ]
Tsukruk, Vladimir V.
机构
[1] USAF, Mat & Mfg Directorate, Res Lab, Wright Patterson AFB, OH 45433 USA
[2] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA
[3] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA
关键词
D O I
10.1021/cm0622093
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The unusual thermal behavior of ultrathin plasma polymerized polymer films on silicon wafers were investigated. The polymer films were deposited by the PECVD technique in a custom built PECVD reactor and characterized by FTIR, AFM, and XPS. Thermal expansion of the polymer films was studied by measuring the thickness of the films in the course of heating and cooling using ellipsometry, and the thickness value was confirmed by AFM. The plasma-polymerized polymers exhibited an important nonlinear variation of thickness with temperature when cooled. Thermal contraction of the polymer films was observed during heating, as well as negative thermal expansion was found to be reversible.
引用
收藏
页码:129 / 131
页数:3
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