Microstructure and optical properties of aluminum nitride thin films

被引：0
|
作者：
Watanabe, Y [1 ]
Nakamura, Y [1 ]
Hirayama, S [1 ]
Naota, Y [1 ]
机构：
[1] NATL DEF ACAD,DEPT MAT SCI & ENGN,YOKOSUKA,KANAGAWA 239,JAPAN
来源：
POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II | 1996年 / 403卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：539 / 544
页数：6
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