A thermodynamical growth model of the SnO2/Fe2O3 multilayer films

被引:0
|
作者
Zhao, YS [1 ]
Yan, DW
Ma, XC
Kang, CH
Zou, HZ
Du, GT
机构
[1] Jilin Univ, Dept Elect Engn, Changchun 130023, Peoples R China
[2] Jilin Univ, State Key Lab Integrated Optoelect, Changchun 130023, Peoples R China
关键词
thermodynamical growth model; multilayer films; gas sensors;
D O I
10.1016/S0925-4005(97)00291-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The microstructural investigation of SnO2/Fe2O3 multilayer films, prepared by PECVD, was studied by SEM. It is found that the SnO2 films grow up from the pits of Fe2O3 columnar structure. From experimental phenomenon, a thermodynamical growth model of multilayer films has been suggested. The calculation shows that SnO2 grow up very fast from the Fe2O3 pits at the beginning of deposition. After that, the growth rate decreases gradually, and then, the rate becomes stable, the columnar structure forms at a stable growth rate. The contact area of SnO2 with Fe2O3 film is increased in this case, which makes these films have a strong adhesion. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:167 / 171
页数:5
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