A Microelectromechanical Disk Resonator-based Bandpass Filter for Wireless RF Applications

Significant development has been observed over the past few years in the usage of microelectromechanical system (MEMS)-based passive components in the radio frequency microelectronics domain, especially in wireless transceiver components. This is largely due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS integrated circuits, low power consumption etc. This paper presents a MEMS bandpass filter with center frequency of 54.65 MHz and bandwidth of 1 MHz. Radial-contour mode circular disk resonators have been mechanically coupled using extensional mode beams for realizing the bandpass filtering action. The filter structure has been designed and simulated in CoventorWare finite-element platform following the PolyMUMPs surface micromachining process.