Strain gauge using Si-based optical microring resonator

被引：12

作者：

Lei, Longhai ^{[1
,2
]}

Tang, Jun ^{[1
,2
]}

Zhang, Tianen ^{[1
,2
]}

Guo, Hao ^{[1
,2
]}

Li, Yanna ^{[1
,2
]}

Xie, Chengfeng ^{[1
,2
]}

Shang, Chenglong ^{[1
,2
]}

Bi, Yu ^{[1
,2
]}

Zhang, Wendong ^{[1
,2
]}

Xue, Chenyang ^{[1
,2
]}

Liu, Jun ^{[1
,2
]}

机构：

[1] North Univ China, Key Lab Instrumentat Sci & Dynam Measurement, Minist Educ, Taiyuan 030051, Peoples R China

[2] North Univ China, Key Lab Sci & Technol Elect Test & Measurement, Taiyuan 030051, Peoples R China

来源：

APPLIED OPTICS | 2014年 / 53卷 / 36期

基金：

美国国家科学基金会;

关键词：

SENSOR;

D O I：

10.1364/AO.53.008389

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents a strain gauge using the mechanical-optical coupling method. The Si-based optical microring resonator was employed as the sensing element, which was embedded on the microcantilevers. The experimental results show that applying external strain triggers a clear redshift of the output resonant spectrum of the structure. The sensitivity of 93.72 pm/MPa was achieved, which also was verified using theoretical simulations. This paper provides what we believe is a new method to develop micro-opto-electromechanical system (MOEMS) sensors. (C) 2014 Optical Society of America

引用

页码：8389 / 8394

页数：6

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