MEMS-based ZnO piezoelectric tactile sensor for minimally invasive surgery

被引：0
|
作者：
Wang, Minrui [1 ]
Wang, Jing
Cui, Yan
Wang, Liding
机构：
[1] Dalian Univ Technol, MST Res Ctr, Dalian 116023, Peoples R China
[2] Dalian Univ Technol, Dept Elect Engn, Dalian 116023, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2006年 / 35卷
关键词：
tactile sensor; piezoelectric; edoscopic grasper;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor, which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS). The sensor includes a silicon substrate, platinum bottom electrode, platinum top electrode, and a ZnO piezoelectric thin film, which is sandwiched between the two-electrode layers. The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7 pc/uN. The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time, and manipulating the tissue safely.
引用
收藏
页码：436 / 438
页数：3
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