Optical Cryostat Realizations at Absolut System

被引:0
|
作者
Trollier, T. [1 ]
Ravex, A. [1 ]
Tanchon, J. [1 ]
机构
[1] Absolut Syst, F-38240 Meylan, France
来源
关键词
Cryostat; cryocooler; Pulse Tube; optical windows;
D O I
10.1063/1.4860688
中图分类号
O414.1 [热力学];
学科分类号
摘要
This paper describes two kinds of optical cryostats designed and manufactured at Absolut System. The first one makes use of pressurized LN2 for temperature control of a sample holder in the 80 K 470 K temperature range. An optical window is implemented above the sample holder to allow for rugosity and 3D distortion of heterogeneous semicon sample assemblies on a wafer. The second one makes use of CRYOMECH remote motor type pulse tube cryocoolers for temperature control of the sample holder in the 3 K 300 K temperature range. In this type of cryostats, particular attention has been paid to reduce the vibrations exported by the cooler. These 4 K ultra low vibration cryostats are used for characterization of samples via optical windows. Both designs will be presented and the performance reported.
引用
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页码:99 / 104
页数:6
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