Logic circuits composed of flexible carbon nanotube thin-film transistor and ultra-thin polymer gate dielectric

被引:27
|
作者
Lee, Dongil [1 ]
Yoon, Jinsu [2 ]
Lee, Juhee [2 ]
Lee, Byung-Hyun [1 ]
Seol, Myeong-Lok [1 ]
Bae, Hagyoul [1 ]
Jeon, Seung-Bae [1 ]
Seong, Hyejeong [3 ,4 ]
Im, Sung Gap [3 ,4 ]
Choi, Sung-Jin [2 ]
Choi, Yang-Kyu [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Sch Elect Engn, 291 Daehak Ro, Daejeon 34141, South Korea
[2] Kookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
[3] Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, 291 Daehak Ro, Daejeon 34141, South Korea
[4] Korea Adv Inst Sci & Technol, Graphene Res Ctr, KI Nanocentury, Daejeon 34141, South Korea
来源
SCIENTIFIC REPORTS | 2016年 / 6卷
基金
新加坡国家研究基金会;
关键词
CHEMICAL-VAPOR-DEPOSITION; PERFORMANCE; ELECTRONICS;
D O I
10.1038/srep26121
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Printing electronics has become increasingly prominent in the field of electronic engineering because this method is highly efficient at producing flexible, low-cost and large-scale thin-film transistors. However, TFTs are typically constructed with rigid insulating layers consisting of oxides and nitrides that are brittle and require high processing temperatures, which can cause a number of problems when used in printed flexible TFTs. In this study, we address these issues and demonstrate a method of producing inkjet-printed TFTs that include an ultra-thin polymeric dielectric layer produced by initiated chemical vapor deposition (iCVD) at room temperature and highly purified 99.9% semiconducting carbon nanotubes. Our integrated approach enables the production of flexible logic circuits consisting of CNT-TFTs on a polyethersulfone (PES) substrate that have a high mobility (up to 9.76 cm(2)V(-1)sec-1), a low operating voltage (less than 4V), a high current on/off ratio (3 x 10(4)), and a total device yield of 90%. Thus, it should be emphasized that this study delineates a guideline for the feasibility of producing flexible CNT-TFT logic circuits with high performance based on a low-cost and simple fabrication process.
引用
收藏
页数:7
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