Positive temperature coefficient of resistivity in thin films of barium titanate

被引：15
|
作者：
Syrtsov, SR
Shut, VN
Kashevich, IF
Sedlovsky, AS
Watts, BE
机构：
[1] NAS Belarus, ITA, Lab Nonlinear Mat, Vitebsk 210717, BELARUS
[2] CNR, Inst Maspec, I-43010 Parma, Italy
来源：
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2002年 / 5卷 / 2-3期
关键词：
positive temperature coefficient of resistivity (PTCR); thin films; high-frequency sputtering;
D O I：
10.1016/S1369-8001(02)00077-X
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
One of the perspective directions in using positive temperature coefficient (PTC) thermistors is their application in surface heater in various electronic devices and integrated circuits. The special interest in this connection makes possible fabrication of thin film structures on the basis of materials with PTCR. In the given work a result of the investigation of Y-BaTiO3 thin films has been presented. Thin films have been deposited by RF-sputtering technique. Films had thickness of 1.5-2 mum. Subsequent annealing was carried out to obtain polycrystalline films of a single phase. The temperature dependence of resistance of films has been investigated. The increase of the resistance were observed in the temperature range 50-80degreesC. The jump of the resistance in field of phase transition was 70%. (C) 2003 Elsevier Science Ltd. All rights reserved.
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页码：223 / 225
页数：3
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