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- [1] Research of SMO process to improve the imaging capability of lithography system for 28nm node and beyond2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017), 2017,Yu, Haibin论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaZhang, Yueyu论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaJiang, Binjie论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaYu, Shirui论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaMao, Zhibiao论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R China
- [2] Joint-Optimization for SRAM and Logic for 28nm node and belowDESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION IV, 2010, 7641Verhaegen, Staf论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Louvain, Belgium IMEC, Kapeldreef 75, B-3001 Louvain, BelgiumSmayling, Michael C.论文数: 0 引用数: 0 h-index: 0机构: Tela Innovat Inc, Campbell, CA 95008 USA IMEC, Kapeldreef 75, B-3001 Louvain, BelgiumDe Bisschop, Peter论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Louvain, Belgium IMEC, Kapeldreef 75, B-3001 Louvain, BelgiumLaenens, Bart论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Louvain, Belgium IMEC, Kapeldreef 75, B-3001 Louvain, Belgium
- [3] A STUDY OF AA CD UNIFORMITY LOADING OPTIMIZATION AT 28NM NODE2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017), 2017,Zhu, YiZheng论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaLu, Lian论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaChen, Fuhong论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaChan, Sifei论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaLi, Quanbo论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaZhang, Yu论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R ChinaPang, Albert论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai, Peoples R China Shanghai Huali Microelect Corp, Shanghai, Peoples R China
- [4] The Study of 28nm Node Poly Double Patterning Integrated Process2015 China Semiconductor Technology International Conference, 2015,Li, Zhonghua论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaLi, Runling论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaGuan, Tianpeng论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaLiu, Biqiu论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaMao, Xiaoming论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaMeng, Xiangguo论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaLi, Quanbo论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaLi, Fang论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaYang, Zhengkai论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaZhang, Yu论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R ChinaPang, Albert论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China
- [5] NICKEL SILICIDE ANNEAL PROCESS RESEARCH FOR 28NM CMOS NODE2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017), 2017,Wen, Zhenping论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201210, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201210, Peoples R ChinaCheng, Xinhua论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201210, Peoples R China Shanghai Huali Microelect Corp, Shanghai 201210, Peoples R ChinaFang, Jingxun论文数: 0 引用数: 0 h-index: 0机构: Shanghai Huali Microelect Corp, Shanghai 201210, Peoples R China
- [6] Power Optimization Approach of ORCA Processor for 32/28nm Technology NodeTENTH INTERNATIONAL CONFERENCE ON COMPUTER SCIENCE AND INFORMATION TECHNOLOGIES REVISED SELECTED PAPERS CSIT-2015, 2015, : 11 - 14Babayan, Davit论文数: 0 引用数: 0 h-index: 0机构: Natl Polytech Univ Armenia, Synopsys Armenia CJSC, Yerevan, Armenia Natl Polytech Univ Armenia, Synopsys Armenia CJSC, Yerevan, Armenia
- [7] OPTIMIZATION OF 28NM HK/MG SINGLE WAFER CLEANING PROCESS2016 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2016,Liang, Haihui论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R ChinaLiu, JiaLei论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R ChinaLiu, HuanXin论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R ChinaHe, Yonggen论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R ChinaWu, Jingang论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R ChinaGe, Xiaojing论文数: 0 引用数: 0 h-index: 0机构: Lam Res Serv Shanghai Co Ltd, Bi Bo Rd,Zhangjiang Hi Tech Pk, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R ChinaHaigermoser, Christian论文数: 0 引用数: 0 h-index: 0机构: Lam Res Serv Shanghai Co Ltd, Bi Bo Rd,Zhangjiang Hi Tech Pk, Shanghai, Peoples R China Semicond Mfg Int Corp, Technol R&D Ctr, 18 Zhangjiang Rd, Shanghai, Peoples R China
- [8] CPI Challenges to BEOL at 28nm Node and Beyond2012 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2012,Ryan, Vivian论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USA GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USABreuer, Dirk论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAGeisler, Holm论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAKioussis, Dimitri论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, Hopewell Jct, NY 12533 USA GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USALehr, Matthias U.论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAPaul, Jens论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAMachani, Kashi论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAShah, Chirag论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, Sunnyvale, CA 94085 USA GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAKosgalwies, Sven论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USALehmann, Lothar论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USALee, Jaesik论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAKuechenmeister, Frank论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, D-01109 Dresden, Germany GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USARyan, E. Todd论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USA GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USAKarimanal, Kamal论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, Sunnyvale, CA 94085 USA GLOBALFOUNDRIES Inc, 257 Fuller Rd, Albany, NY 12203 USA
- [9] Fabrication of 28nm pitch Si fins with DSA lithographyALTERNATIVE LITHOGRAPHIC TECHNOLOGIES V, 2013, 8680Schmid, Gerard论文数: 0 引用数: 0 h-index: 0机构: Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAFarrell, Richard论文数: 0 引用数: 0 h-index: 0机构: Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAXu, Ji论文数: 0 引用数: 0 h-index: 0机构: Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAPark, Chanro论文数: 0 引用数: 0 h-index: 0机构: Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAPreil, Moshe论文数: 0 引用数: 0 h-index: 0机构: Globalfoundries, Sunnyvale, CA 94085 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAChakrapani, Vidhya论文数: 0 引用数: 0 h-index: 0机构: Amer LLC, Tokyo Electron Technol Ctr, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAMohanty, Nihar论文数: 0 引用数: 0 h-index: 0机构: Amer LLC, Tokyo Electron Technol Ctr, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAKo, Akiteru论文数: 0 引用数: 0 h-index: 0机构: Amer LLC, Tokyo Electron Technol Ctr, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USACicoria, Michael论文数: 0 引用数: 0 h-index: 0机构: Amer LLC, Tokyo Electron Technol Ctr, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USAHetzer, David论文数: 0 引用数: 0 h-index: 0机构: Amer LLC, Tokyo Electron Technol Ctr, Albany, NY 12203 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USASomervell, Mark论文数: 0 引用数: 0 h-index: 0机构: Tokyo Electron Amer Inc, Austin, TX 78741 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USARathsack, Benjamen论文数: 0 引用数: 0 h-index: 0机构: Tokyo Electron Amer Inc, Austin, TX 78741 USA Globalfoundries, 257 Fuller Rd,Suite 280, Albany, NY 12203 USA
- [10] Thin Film Challenges in 28nm Technology NodeCHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2012 (CSTIC 2012), 2012, 44 (01): : 391 - 394Zhang, Beichao论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaZhang, Bin论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaXiao, Haibo论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaDeng, Hao论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaTong, Hao论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaTan, Jingjing论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaZhou, Ming论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaLi, Nicola论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaGuo, Shibi论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaRen, Wanchun论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaWang, Xiaona论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaJing, Xuezheng论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaXiang, Yanghui论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaPing, Yanlei论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaBao, Yu论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaZhang, Ziying论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaWang, Zengtao论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaLu, Wei论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R ChinaWu, Jinggang论文数: 0 引用数: 0 h-index: 0机构: Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China