Tip-scanning dynamic force microscope using piezoelectric cantilever for full wafer inspection

被引：7
|
作者：
Chu, J
Maeda, R
Itoh, T
Suga, T
机构：
[1] Minist Int Trade & Ind, Agcy Ind Sci & Technol, Mech Engn Lab, Tsukuba, Ibaraki 3050044, Japan
[2] Univ Tokyo, Adv Sci & Technol Res Ctr, Meguro Ku, Tokyo 1530041, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 12B期
关键词：
DFM; piezoelectric; micro-force sensor; actuator; sol-gel;
D O I：
10.1143/JJAP.38.7155
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.
引用
收藏
页码：7155 / 7158
页数：4
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