Investigation for kinetics law of oxidation of a nano-scale copper film

被引：0
|
作者：
Min, Jiang [1 ]
机构：
[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China
来源：
ACTA CHIMICA SINICA | 2007年 / 65卷 / 15期
关键词：
cu thin film; oxidation; kinetics characterization; sheet resistance; transmission spectrum;
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Oxidation behaviour of a nano-scale copper film at 140 V was investigated in this paper. Nano-scale copper films were prepared on glass substrate by vacuum deposition at different depositing rates. Atomic force microscope (AFM) was applied to characterization of the surface morphology of these thin films to choose suitable samples. Kinetics of the oxidation process of the copper films in the thickness range of 16-22 nm at 140 V was studied by using transmission spectrum and sheet resistance methods. The crystal structures and compositions of the oxidation products were analyzed with X-ray diffraction (XRD). The results show that the copper was oxidized to form Cu2O following a cubic rate law at 140 V.
引用
下载
收藏
页码：1521 / 1526
页数：6
相关论文
共 16 条
  • [1] Investigation of copper diffusion in SiOF, TEOS oxide and TCA oxide using bias thermal stress (BTS) tests
    Abdul-Hak, A
    Ahrens, C
    Hasse, W
    Ullmann, J
    [J]. MICROELECTRONIC ENGINEERING, 1997, 37-8 (1-4) : 205 - 210
  • [2] Charge-transfer complexes of Cu(II)/HD analogue in sol-gel sensors
    Brinkley, JF
    Kirkey, ML
    Marques, ADS
    Lin, CT
    [J]. CHEMICAL PHYSICS LETTERS, 2003, 367 (1-2) : 39 - 43
  • [3] Deng C, 2006, ACTA CHIM SINICA, V64, P1031
  • [4] Fu XG, 2005, ACTA CHIM SINICA, V63, P648
  • [5] Oxidation behaviour of Cu thin films on Si wafer at 175-400°C
    Gao, W
    Gong, H
    He, J
    Thomas, A
    Chan, L
    Li, S
    [J]. MATERIALS LETTERS, 2001, 51 (01) : 78 - 84
  • [6] A comparative study of SnO2 and SnO2:Cu thin films for gas sensor applications
    Kissine, VV
    Voroshilov, SA
    Sysoev, VV
    [J]. THIN SOLID FILMS, 1999, 348 (1-2) : 304 - 311
  • [7] KUBASCHEWSKI O, 1962, OXIDATION METALS ALL, P82
  • [8] DIFFUSION GROWTH OF OXIDE LAYERS ON GAAS SINGLE-CRYSTALS
    KUCERA, J
    NAVRATIL, K
    [J]. THIN SOLID FILMS, 1990, 191 (02) : 211 - 220
  • [9] Study of interaction between polyimide and Cu under a high humidity condition
    Nagai, N
    Hironaka, T
    Imai, T
    Harada, T
    Nishimura, M
    Mimori, R
    Ishida, H
    [J]. APPLIED SURFACE SCIENCE, 2001, 171 (1-2) : 101 - 105
  • [10] Electrochemical noise analysis and electrochemical impedance spectroscopy for pure copper in chloride media
    Nagiub, AM
    [J]. CHINESE JOURNAL OF CHEMISTRY, 2006, 24 (02) : 247 - 252
12