Educational modules on RF MEMS and microsystems

被引：0
|
作者：
Pham, A [1 ]
机构：
[1] Univ Calif Davis, Microwave Microsyst Lab, Dept Elect & Comp Engn, Davis, CA 95616 USA
来源：
53RD ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 2003 PROCEEDINGS | 2003年
关键词：
D O I：
10.1109/ECTC.2003.1216325
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
We will present the development of a seminar course on radio frequency microelectromechanical systems (RF MEMS) and RF Microsystems. The seminar course will be divided into six topics that span over a 12-week summer. Each module will represent a topic of this seminar course to include (1) understanding of RF microsystems, (2) RF micromachined passive devices, (3) RF microelectromechanical devices (MEMs), (4) impact of RF micromachined devices and MEMs on RF microsystems, (5) fundamentals. of micromachining fabrication, and (6) integration and packaging of RF MEMS and microsystems. This seminar course will be published in six multi-media modules that are in power point presentations with audio. These modules will be widely disseminated in the technical and educational communities as well as web sites. This course will be a taught on site at the University of California at Davis during. summer quarters. The intent of this course is to provide students supplemental materials for traditional undergraduate electrical curriculums and to introduce. students to RF MEMS and packaging of microsystems.
引用
收藏
页码：495 / 497
页数：3
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