Micropipes: Hollow tubes in silicon carbide

被引:0
|
作者
Heindl, J [1 ]
Strunk, HP [1 ]
Heydemann, VD [1 ]
Pensl, G [1 ]
机构
[1] UNIV ERLANGEN NURNBERG,INST ANGEW PHYS,D-91058 ERLANGEN,GERMANY
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1997年 / 162卷 / 01期
关键词
D O I
10.1002/1521-396X(199707)162:1<251::AID-PSSA251>3.0.CO;2-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Micropipes are hollow tubular defects penetrating SiC single crystals. Different mechanisms of formation and stabilization as well as energetic aspects are discussed.
引用
收藏
页码:251 / 262
页数:12
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