Fabrication of patterned media for high density magnetic storage

被引：5

作者：

Ross, CA ^{[1
]}

Smith, HI

Savas, T

Schattenburg, M

Farhoud, M

Hwang, M

Walsh, M

Abraham, MC

Ram, RJ

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[3] MIT, Dept Phys, Cambridge, MA 02139 USA

[4] MIT, Space Res Ctr, Cambridge, MA 02139 USA

[5] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA

来源：

MICROELECTRONIC ENGINEERING | 2000年 / 53卷 / 1-4期

关键词：

Electrodeposition - Etching - Evaporation - Lithography - Magnetic materials - Magnetic properties - Magnetic storage - Nanotechnology;

D O I：

10.1016/S0167-9317(00)00267-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Arrays of discrete, lithographically-patterned magnetic elements have been proposed as a new generation of ultra-high density patterned magnetic storage media. Interferometric lithography has been used to make prototype arrays over large areas with periods of 100-200 nm. Arrays of magnetic pillars, pyramids, and dots have been made by electrodeposition, evaporation and liftoff, and etching processes, and the magnetic properties of the particles and their mutual interactions have been measured.

引用

页码：67 / 67

页数：1

共 50 条

[1] Fabrication of patterned media for high density magnetic storage
Ross, C.A.
Smith, Henry I.
Savas, T.
Schattenburg, M.
Farhoud, M.
Hwang, M.
Walsh, M.
Abraham, M.C.
Ram, R.J.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 17 : 3168 - 3176
[2] Fabrication of patterned media for high density magnetic storage
Ross, CA
Smith, HI
Savas, T
Schattenburg, M
Farhoud, M
Hwang, M
Walsh, M
Abraham, MC
Ram, RJ
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 3168 - 3176
[3] Fabrication of Patterned Magnetic Nanomaterials for Data Storage Media
Chulmin Choi
Kunbae Noh
Cihan Kuru
Li-Han Chen
Tae-Yeon Seong
Sungho Jin
JOM, 2012, 64 : 1165 - 1173
[4] Fabrication of Patterned Magnetic Nanomaterials for Data Storage Media
Choi, Chulmin
Noh, Kunbae
Kuru, Cihan
Chen, Li-Han
Seong, Tae-Yeon
Jin, Sungho
JOM, 2012, 64 (10) : 1165 - 1173
[5] Magnetic properties of high-density patterned magnetic media
Gurovich, B. A.
Prikhodko, K. E.
Kuleshova, E. A.
Yakubovsky, A. Yu
Meilikhov, E. Z.
Mosthenko, M. G.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2010, 322 (20) : 3060 - 3063
[6] Fabrication of magnetic nanodots array using UV nanoimprint lithography and electrodeposition for high density patterned media
Shinohara, Hidetoshi
Fukuhara, Makoto
Hirasawa, Tamano
Mizuno, Jun
Shoji, Shuichi
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2008, 21 (04) : 591 - 596
[7] Capped bit patterned media for high density magnetic recording
Li, Shaojing
Livshitz, Boris
Bertram, H. Neal
Inomata, Akihiro
Fullerton, Eric E.
Lomakin, Vitaliy
JOURNAL OF APPLIED PHYSICS, 2009, 105 (07)
[8] Fabrication of patterned Pt/Co multilayers for high-density probe storage
Nutter, PW
Du, H
Vorithitikul, V
Edmundson, D
Hill, EW
Miles, JJ
Wright, CD
IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY, 2003, 150 (05) : 227 - 231
[9] High Density Patterned Media Fabrication Using Jet and Flash Imprint Lithography
Ye, Zhengmao
Ramos, Rick
Brooks, Cynthia
Simpson, Logan
Fretwell, John
Carden, Scott
Hellebrekers, Paul
LaBrake, Dwayne
Resnick, Douglas J.
Sreenivasan, S. V.
ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES III, 2011, 7970
[10] Recording performance of high-density patterned perpendicular magnetic media
Albrecht, M
Rettner, CT
Moser, A
Best, ME
Terris, BD
APPLIED PHYSICS LETTERS, 2002, 81 (15) : 2875 - 2877

← 1 2 3 4 5 →