Thermal Stress Analysis of The Microtoroid Under CO2 Laser

被引：0
|
作者：
Jiang, Guoqing [1 ]
Yan, Shubin [2 ]
Yan, Yingzhan [2 ]
Xiong, Jijun [1 ]
机构：
[1] North Univ China, Natl Key Lab Elect Measurement Technol, Taiyuan 030051, Peoples R China
[2] North Univ China, Key Lab Instrumentat Sci Dynam Measurement, Taiyuan 030051, Peoples R China
来源：
2009 IEEE 8TH INTERNATIONAL CONFERENCE ON ASIC, VOLS 1 AND 2, PROCEEDINGS | 2009年
基金：
中国国家自然科学基金;
关键词：
CO2; laser; thermal stress; microtoroid; Raman frequency shift; FUSED-SILICA MICROSPHERES; OPTICAL MICROCAVITIES; MODE; RESONANCES; EMISSION; SYSTEM; FIBER;
D O I：
10.1109/ASICON.2009.5351518
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The planar microtoroid with unique whispering gallery mode (WGM) has ultra-high Q value (UHQ) and better optical property. In order to get the UHQ cavity, it is very important to deal with the surface of microtoroid using CO2 laser reflow during the fabrication process. Because of the TEM00 laser output, there will be thermal stress which affects the Q value badly. In this paper, we design physical model and analyze the temperature distribution theoretically. Furthermore, thermal stress of different microtoroids has been tested with Raman Spectral Analyzer. At last we found that when the optical path is stabile and the lens is fixed the output power in the 7/1000 duty cycle of 30 minutes long pulse will have a good result.
引用
收藏
页码：1023 / +
页数：2
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