Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

被引：4
|
作者：
Leman, O. [1 ]
Mailly, F. [1 ]
Latorre, L. [1 ]
Nouet, P. [1 ]
机构：
[1] Univ Montpellier 2, CNRS, LIRMM, Montpellier, France
来源：
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING | 2010年 / 63卷 / 03期
关键词：
MEMS; Convective accelerometer; Thermal sigma-delta; SIMULATION;
D O I：
10.1007/s10470-009-9419-2
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal properties of the sensor, a first order sigma-delta modulator is built. This "electro-physical'' modulator realizes an analog-to-digital conversion of the acceleration signal. Besides, the feedback mode of operation improves the sensor overall performance.
引用
收藏
页码：415 / 423
页数：9
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