Plasma Parameters in a Dual-Camera Low-Power Inductive RF Discharge with an External Magnetic Field

被引：2

作者：

Petrov, A. K. ^{[1
]}

Vavilin, K. V. ^{[1
]}

Kozlov, G. P. ^{[1
]}

Kralkina, E. A. ^{[1
]}

Nekliudova, P. A. ^{[1
]}

Nikonov, A. M. ^{[1
]}

Pavlov, V. B. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia

来源：

MOSCOW UNIVERSITY PHYSICS BULLETIN | 2015年 / 70卷 / 06期

关键词：

plasma; helicon; Trivelpiece-Gould wave; inductive; RF; HELICON PLASMA; FREQUENCY; VOLUME; WAVES; GASES;

D O I：

10.3103/S0027134915060144

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The results from studying a dual-camera inductive radio-frequency (RF) discharge that was placed in an external magnetic field are presented. The operating conditions were as follows: an argon pressure of 5 x 10(-5)-6 x 10(-2) Torr, an external magnetic field strength of 0-60 G, and an RF generator power supply of 25-300 W. During the experiment the resonant RF power consumption and the correspondence between the local power-consumption maxima and spatial maxima of the plasma concentration as a function of the external magnetic field were observed. The comparison of the experimental results with the results of the mathematical simulation indicates that the resonant character of the discharge is associated with the excitation of helicons and Trivelpiece-Gould waves.

引用

页码：527 / 535

页数：9

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