Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow

被引:6
|
作者
Morris, Dylan J. [1 ]
机构
[1] Natl Inst Stand & Technol, Mat Sci & Engn Lab, Gaithersburg, MD 20899 USA
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2009年 / 80卷 / 12期
关键词
PRESSURE; JET;
D O I
10.1063/1.3266972
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Diamond nanoindentation probes may perform thousands of indentations over years of service life. There is a broad agreement that the probes need frequent cleaning, but techniques for doing so are mostly anecdotes shared between experimentalists. In preparation for the measurement of the shape of a nanoindentation probe by a scanning probe microscope, cleaning by carbon dioxide snow jets and oxygen plasma was investigated. Repeated indentation on a thumbprint-contaminated surface formed a compound that was very resistant to removal by solvents, CO(2) snow, and plasma. CO(2) snow cleaning is found to be a generally effective cleaning procedure. [doi: 10.1063/1.3266972]
引用
收藏
页数:3
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