The use of scanning electron microscopy, Auger electron spectroscopy, secondary ion mass spectrometry for investigation of structure and elemental composition of the electroinsulating coating

被引：0

作者：

Goncharenko, YD ^{[1
]}

Evseyev, LA ^{[1
]}

机构：

[1] Russian State Res Ctr, Atom Resources Res Inst, Dimitrovograd, Russia

来源：

IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1998年 / 62卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：496 / 501

页数：6

共 50 条

[1] 3-DIMENSIONAL ELEMENTAL ANALYSIS WITH AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY
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[2] MATERIALS CHARACTERIZATION BY AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY
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[3] INVESTIGATION OF ORTHODONTIC WIRES BY SCANNING ELECTRON-MICROSCOPY AND AUGER-ELECTRON SPECTROSCOPY
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[4] Composition and distribution profile of uncontrolled impurities in molybdenum analyzed by the auger electron spectroscopy and secondary ion mass spectrometry methods
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[5] COMPOSITION PROFILES OF CVD PLATINUM AND PLATINUM SILICIDE BY AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY
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[6] Composition and distribution profile of uncontrolled impurities in molybdenum analyzed by the auger electron spectroscopy and secondary ion mass spectrometry methods
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[8] Comparison of submicron particle analysis by Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and secondary electron microscopy with energy dispersive x-ray spectroscopy
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[9] Comparison of submicron particle analysis by Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and secondary electron microscopy with energy dispersive x-ray spectroscopy
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[10] Photo and Auger Electron Spectroscopy (ESCA) and Secondary Ion Mass Spectroscopy (SIMS).
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