Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package

被引:42
|
作者
Liu, K. H. [2 ]
Chen, M. F. [1 ]
Pan, C. T. [1 ]
Chang, M. Y. [3 ]
Huang, W. Y. [3 ]
机构
[1] Natl Sun Yat Sen Univ, Ctr Nanosci & Nanotechnol, Dept Mech & Electromech Engn, Kaohsiung 804, Taiwan
[2] ROC Mil Acad, Dept Mech Engn, Kaohsiung, Taiwan
[3] Natl Sun Yat Sen Univ, Dept Photon, Kaohsiung 804, Taiwan
关键词
OLED; Gapless micro-lens array; NiCo electroplating; Fill-factor; THERMAL REFLOW PROCESS; GLASS; MICROLENSES; DEVICES;
D O I
10.1016/j.sna.2010.02.020
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Organic light-emitting diode (OLED) has been the subject of much interest in the lighting and display module. This study focuses on how to enhance brightness and scatter through a micro-lens array (MLA) with high fill-factor. A LIGA-like (Lithographie Galvanoformung Abformung, LIGA) process was applied to the fabrication process because it has good replication for microstructures. Seven kinds of micro-lens arrays with different dimensions were designed. These dimensions with different aspect ratio were divided into two groups, i.e. gapless high fill-factor and low fill-factor with gap. They were used to compare their optical properties of brightness with each other. In addition, a controllable method was also developed to design the contour of a micro-lens. Then, a metallic mold with MLA was fabricated by nickel-cobalt (NiCo) electroplating process. A highly accurate and strong mold can be obtained. Finally, a UV (ultraviolet) curable polymer was used as the material of an optical film in this replication process of a MLA. After these optical films with MLAs were obtained, an optical microscope (OM) and a photometer were used to measure and characterize the optical results. The experimental results of the MLA were compared with those of the design. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:126 / 134
页数:9
相关论文
共 50 条
  • [31] Fabrication of multi-scale micro-lens arrays on hydrophobic surfaces using a drop-on-demand droplet generator
    Zhu, Xiaoyang
    Zhu, Li
    Chen, Hejuan
    Yang, Mei
    Zhang, Weiyi
    OPTICS AND LASER TECHNOLOGY, 2015, 66 : 156 - 165
  • [32] Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates
    Saito, Keisuke
    Hayashi, Hidetaka
    Nishikawa, Hiroyuki
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 306 : 284 - 287
  • [33] High concentration factor diffractive microlenses integrated with CMOS single-photon avalanche diode detector arrays for fill-factor improvement
    Connolly, Peter W. R.
    Ren, Ximing
    McCarthy, Aongus
    Mai, Hanning
    Villa, Federica
    Waddie, Andrew J.
    Taghizadeh, Mohammad R.
    Tosi, Alberto
    Zappa, Franco
    Henderson, Robert K.
    Buller, Gerald S.
    APPLIED OPTICS, 2020, 59 (14) : 4488 - 4498
  • [34] Spherical and Non-Spherical High Fill-Factor Microlens Arrays Fabricated by Polymer Coating on Isotropically Etched Quartz
    Nam, Minwoo
    Oh, Haekwan
    Kim, Geunyoung
    Seo, Hyunwoo
    Song, Yotak
    Yang, Sang Sik
    Lee, Kee-Keun
    RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS AND NANODEVICES X, 2011, 7928
  • [35] Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow
    Junjie Zhu
    Mujun Li
    Jinfeng Qiu
    Huichun Ye
    Microsystem Technologies, 2019, 25 : 1235 - 1241
  • [36] Precision Glass Molding of High Filling Factor Micro Lens Arrays
    Chen, Chun-Chieh
    Huang, Chien-Yao
    Peng, Wei-Jei
    Hsu, Wei-Yao
    ADVANCES IN MATERIALS AND PROCESSING TECHNOLOGIES XVI, 2014, 939 : 349 - 354
  • [37] Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow
    Zhu, Junjie
    Li, Mujun
    Qiu, Jinfeng
    Ye, Huichun
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2019, 25 (04): : 1235 - 1241
  • [38] Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces
    Chen, Jianwei
    Cheng, Jiyi
    Zhang, Dapeng
    Chen, Shih-Chi
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2016, 44 : 70 - 74
  • [39] Improvement in light out -coupling efficiency of OLED by using high fill factor parabola curve microlens arrays
    Zhong, Kejun
    Fu, Yanjun
    Jiang, Guangyu
    OPTIK, 2020, 212
  • [40] Applying ANN/GA algorithm to optimize the high fill-factor microlens array fabrication using UV proximity printing process
    Hung, SY
    Chao, CK
    Lin, TH
    Lin, CP
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (12) : 2389 - 2397